Recent progress in subwavelength grating metamaterial engineered silicon photonic devices.

Abstract

In this talk we present our recent advances in SWG metamaterial engineering. We will show a 1D-optical phased array composed of 112 evanescent-coupled surface emitting antennas with a length of 1.5 mm and fed by a compact distributed Bragg deflector. The measurements demonstrate a wavelength-steerable collimated beam with a far-field angular divergence of 1.8o × 0.2o. Experimental results of a bricked SWG 2×2 MMI coupler are also shown, achieving polarization agnostic performance in the 1500nm to 1560nm wavelength range. Both devices were fabricated on a standard 220-nm SOI platform using a single full-etch step process, with a minimum feature size of 80 nm, and thus compatible with immersion deep-UV lithography.