RT Journal Article T1 Suspended silicon waveguides for long-wave infrared wavelengths A1 Soler Penadés, Jordi A1 Sánchez-Postigo, Alejandro A1 Nedeljkovic, Milos A1 Ortega-Moñux, Alejandro A1 Wanguemert-Pérez, Juan Gonzalo A1 Xu, Yolanda A1 Halir, Robert A1 Qu, Zhibo A1 Khokhar, Ali Z. A1 Osman, Ahmed A1 Cao, Wei A1 Littlejohns, Callum G. A1 Cheben, Pavel A1 Molina-Fernández, Íñigo A1 Mashanovich, Goran Z. K1 Fotónica AB In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends. PB Optica Publishing Group YR 2018 FD 2018-02-09 LK https://hdl.handle.net/10630/33537 UL https://hdl.handle.net/10630/33537 LA eng DS RIUMA. Repositorio Institucional de la Universidad de Málaga RD 19 ene 2026