RT Journal Article
T1 Polarization insensitive metamaterial engineered multimode interference coupler in a 220 nm silicon-on-insulator platform
A1 Pérez-Armenta, Carlos
A1 Ortega-Moñux, Alejandro
A1 Luque-González, José Manuel
A1 Halir, Robert
A1 Schmid, Jens
A1 Cheben, Pavel
A1 Molina-Fernández, Íñigo
A1 Wanguemert-Pérez, Juan Gonzalo
K1 Telecomunicaciones-Equipos y material
K1 Sistemas de telecomunicaciones
AB High-index contrast silicon waveguides exhibit strong birefringence that hinders the development of polarization-insensitive devices, especially for sub-micrometer silicon layer thickness. Here a polarizationindependent 2 × 2 multimode interference coupler in a 220 nm silicon-on-insulator platform is designed and experimentally demonstrated for the first time. Leveraging the advanced control of electromagnetic properties provided by a subwavelength grating metamaterial topology, our multimode interference coupler operates for both TE and TM polarization states with measured polarization dependent loss, insertion loss and imbalance all less than 1 dB, and phase errors below 5◦ in the wavelength range from 1500 nm to 1560 nm. The device has a footprint of only 3.5 μm × 47.25 μm and was fabricated using a single etch-step process with a minimum feature size of 100 nm compatible with immersion deep-UV lithography.
PB Elsevier
YR 2023
FD 2023
LK https://hdl.handle.net/10630/26414
UL https://hdl.handle.net/10630/26414
LA eng
NO Carlos Pérez-Armenta, Alejandro Ortega-Moñux, José Manuel Luque-González, Robert Halir, Jens Schmid, Pavel Cheben, Iñigo Molina-Fernández, J. Gonzalo Wangüemert-Pérez, Polarization insensitive metamaterial engineered multimode interference coupler in a 220 nm silicon-on-insulator platform, Optics & Laser Technology, Volume 164, 2023, 109493, ISSN 0030-3992, https://doi.org/10.1016/j.optlastec.2023.109493. (https://www.sciencedirect.com/science/article/pii/S0030399223003869)
NO We acknowledge funding from Ministerio de Economía y Competitividad (PID2019106747RB-I00), Junta de Andalucía (P18-RT-1453, UMA-FEDERJA-158), Ministerio de Ciencia, Innovaci ́on y Universidades (FPU16/06762, FPU19/02408), and Universidad de Málaga.Funding for open access charge: Universidad de Málaga / CBUA.
DS RIUMA. Repositorio Institucional de la Universidad de Málaga
RD 19 ene 2026