RT Conference Proceedings T1 Enhancing optical feedback interferometry with an integrated variable optical attenuator. A1 Arshad, Ayesha A1 Zabit, Usman A1 Bernal, Olivier A1 Deleau, Clement A1 Halir, Robert K1 Interferometría K1 Medidas ópticas AB Optical feedback interferometry is a promising technique for displacement sensing. Maintaining stable and precise optical feedback requires effective control of reflected light intensity. In this study, we propose an integrated on-chip OFI system featuring a variable optical attenuator (VOA) for dynamic feedback regulation. We develop a novel analytical model and, through a realistic attenuator design, demonstrate the system’s capability to achieve high-precision displacement measurements over a wide optical feedback parameter range (2 < C < 100) for target distances up to a few centimetres. These results highlight the potential of this approach for short-range applications with variable reflection conditions, such as MEMS characterisation. YR 2025 FD 2025-07-04 LK https://hdl.handle.net/10630/45360 UL https://hdl.handle.net/10630/45360 LA eng NO Ministerio de Ciencia e Innovación NO Agence nationale de la recherche NO Universidad de Málaga NO Unión Europea NextGenerationEU/PRTR DS RIUMA. Repositorio Institucional de la Universidad de Málaga RD 4 mar 2026