RT Journal Article
T1 Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones.
A1 Saba, Fabio
A1 Campo-Valera, María
A1 Paesante, Davide
A1 Durando, Giovanni
A1 Corallo, Mario
A1 Pugliese, Diego
K1 Micrófonos
K1 Transductores electroacústicos
AB The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with experimental corrections to improve the accuracy of pressure comparison calibrations using active couplers. A key innovation is the incorporation of asymmetric acoustic field analysis, which systematically quantifies and corrects discrepancies arising from cavity geometry, sensor positioning, and resonance effects peculiar of MEMS microphones. The proposed approach significantly reduces measurement uncertainties, especially in the high-frequency range above 5 kHz, where standard calibration techniques face challenges in taking into account localized pressure variations. Furthermore, the implementation of a measurement set-up, which includes the insert voltage technique, allows for an accurate assessment of the preamplifier gain and minimizes systematic errors. Experimental validation shows that the refined calibration methodology produces highly reliable correction values, ensuring a robust performance over a wide frequency range (20 Hz–20 kHz). These advances establish a rigorous framework for standardizing the calibration of MEMS microphones, strengthening their applicability in acoustic monitoring, sound source localization, and environmental sensing.
PB MDPI
YR 2025
FD 2025
LK https://hdl.handle.net/10630/38198
UL https://hdl.handle.net/10630/38198
LA eng
NO Saba, F., Campo-Valera, M., Paesante, D., Durando, G., Corallo, M., & Pugliese, D. (2025). Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones. Sensors, 25(5), 1312.
NO Italian Ministry of University and Research (MUR) in the framework of the continuing-nature project “NEXT-GENERATION METROLOGY”, under the allocation of the Ordinary Fund for research institutions (FOE) 2023 (Ministry Decree n. 789/2023).ThinkInAzul and AgroAlNext programmes, funded by Ministerio de Ciencia, Innovación y Universidades (MICIU) with funding from European Union NextGenerationEU/PRTR-C17.I1 and by Fundación Séneca with funding from Comunidad Autónoma Región de Murcia (CARM).European Union—NextGenerationEU under the National Recovery and Resilience Plan (NRRP), Mission 04 Component 2 Investment 3.1|Project Code: IR0000027—CUP: B33C22000710006— iENTRANCE@ENL: Infrastructure for Energy TRAnsition aNd Circular Economy @EuroNanoLab.
DS RIUMA. Repositorio Institucional de la Universidad de Málaga
RD 21 ene 2026