RT Journal Article
T1 Optical characterization of ALD-coated nanoporous alumina structures: effect of sample geometry or coated layer material
A1 Cuevas, Ana Laura
A1 Vega, Víctor
A1 Domínguez, Antonia
A1 González, Ana Silvia
A1 Prida, Víctor M.
A1 Benavente-Herrera, Juana
K1 Oxido de aluminio
K1 Fotoluminiscencia
K1 Propiedades ópticas
K1 Deposición de capa atómica
K1 Alúmina
AB Optical characterization of nanoporous alumina-based structures (NPA-bSs), obtained by ALD deposition of a thin conformal SiO2 layer on two alumina nanosupports with different geometrical parameters (pore size and interpore distance), was performed by two noninvasive and nondestructive techniques such as spectroscopic ellipsometry (SE) and photoluminescence (Ph) spectra. SE measurements allow us to estimate the refraction index and extinction coefficient for the studied samples and their dependence with wavelength for the 250–1700 nm interval, showing the effect of sample geometry and cover-layer material (SiO2, TiO2, or Fe2O3), which significantly affect the oscillatory character of both parameters, as well as changes associated with the light incidence angle, which are attributed to surface impurities and inhomogeneity. Photoluminescence curves exhibit a similar shape independently of sample pore-size/porosity, but they seem to affect intensity values. This analysis shows the potential application of these NPA-bSs platforms to nanophotonics, optical sensing, or biosensing.
PB MDPI
YR 2023
FD 2023-04-12
LK https://hdl.handle.net/10630/26996
UL https://hdl.handle.net/10630/26996
LA eng
NO Cuevas AL, Vega V, Domínguez A, González AS, Prida VM, Benavente J. Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material. Micromachines. 2023; 14(4):839. https://doi.org/10.3390/mi14040839
NO Partial funding for open access charge: Universidad de Málaga
DS RIUMA. Repositorio Institucional de la Universidad de Málaga
RD 21 ene 2026