2026-06-07T05:20:41Zhttps://riuma.uma.es/rest/oai/request

oai:riuma.uma.es:10630/264142026-02-03T10:59:39Zcom_10630_2254col_10630_37953

00925njm 22002777a 4500 dc Pérez-Armenta, Carlos author Ortega-Moñux, Alejandro author Luque-González, José Manuel author Halir, Robert author Schmid, Jens author Cheben, Pavel author Molina-Fernández, Íñigo author Wanguemert-Pérez, Juan Gonzalo author 2023 High-index contrast silicon waveguides exhibit strong birefringence that hinders the development of polarization-insensitive devices, especially for sub-micrometer silicon layer thickness. Here a polarizationindependent 2 × 2 multimode interference coupler in a 220 nm silicon-on-insulator platform is designed and experimentally demonstrated for the first time. Leveraging the advanced control of electromagnetic properties provided by a subwavelength grating metamaterial topology, our multimode interference coupler operates for both TE and TM polarization states with measured polarization dependent loss, insertion loss and imbalance all less than 1 dB, and phase errors below 5◦ in the wavelength range from 1500 nm to 1560 nm. The device has a footprint of only 3.5 μm × 47.25 μm and was fabricated using a single etch-step process with a minimum feature size of 100 nm compatible with immersion deep-UV lithography. Carlos Pérez-Armenta, Alejandro Ortega-Moñux, José Manuel Luque-González, Robert Halir, Jens Schmid, Pavel Cheben, Iñigo Molina-Fernández, J. Gonzalo Wangüemert-Pérez, Polarization insensitive metamaterial engineered multimode interference coupler in a 220 nm silicon-on-insulator platform, Optics & Laser Technology, Volume 164, 2023, 109493, ISSN 0030-3992, https://doi.org/10.1016/j.optlastec.2023.109493. (https://www.sciencedirect.com/science/article/pii/S0030399223003869) https://hdl.handle.net/10630/26414 https://doi.org/10.1016/j.optlastec.2023.109493 Telecomunicaciones-Equipos y material Sistemas de telecomunicaciones Polarization insensitive metamaterial engineered multimode interference coupler in a 220 nm silicon-on-insulator platform