2026-05-28T15:57:28Zhttps://riuma.uma.es/rest/oai/requestoai:riuma.uma.es:10630/264362026-02-03T12:04:35Zcom_10630_2254col_10630_37959
Recent progress in subwavelength grating metamaterial engineered silicon photonic devices.
Wanguemert-Pérez, Juan Gonzalo
Pérez-Armenta, Carlos
Ginel-Moreno, Pablo
Luque-González, José Manuel
Hadij-El-Houati, Abdelfettah
Sánchez-Postigo, Alejandro
De-Oliva-Rubio, José
Ortega-Moñux, Alejandro
Halir, Robert
Schmid, Jens H.
Cheben, Pavel
Molina-Fernández, Íñigo
Metamateriales
Antenas
Óptica integrada
In this talk we present our recent advances in SWG metamaterial engineering. We will show a 1D-optical phased array composed of 112 evanescent-coupled surface emitting antennas with a length of 1.5 mm and fed by a compact distributed Bragg deflector. The measurements demonstrate a wavelength-steerable collimated beam with a far-field angular divergence of 1.8o × 0.2o. Experimental results of a bricked SWG 2×2 MMI coupler are also shown, achieving polarization agnostic performance in the 1500nm to 1560nm wavelength range. Both devices were fabricated on a standard 220-nm SOI platform using a single full-etch step process, with a minimum feature size of 80 nm, and thus compatible with immersion deep-UV lithography.
2023-05-02T07:00:50Z
2023-05-02T07:00:50Z
2023-05-02T07:00:50Z
2023
conference output
https://hdl.handle.net/10630/26436
eng
SPIE Optics and Optoelectronics Conference 2023
Praga (República Checa)
Abril 2023
open access