2026-06-07T07:27:16Zhttps://riuma.uma.es/rest/oai/request

oai:riuma.uma.es:10630/335372026-02-03T10:56:41Zcom_10630_2254col_10630_37953

00925njm 22002777a 4500 dc Soler Penadés, Jordi author Sánchez-Postigo, Alejandro author Nedeljkovic, Milos author Ortega-Moñux, Alejandro author Wanguemert-Pérez, Juan Gonzalo author Xu, Yolanda author Halir, Robert author Qu, Zhibo author Khokhar, Ali Z. author Osman, Ahmed author Cao, Wei author Littlejohns, Callum G. author Cheben, Pavel author Molina-Fernández, Íñigo author Mashanovich, Goran Z. author 2018-02-09 In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends. https://hdl.handle.net/10630/33537 https://doi.org/10.1364/OL.43.000795 Fotónica Suspended silicon waveguides for long-wave infrared wavelengths