2026-05-29T22:26:03Zhttps://riuma.uma.es/rest/oai/request

oai:riuma.uma.es:10630/335372026-02-03T10:56:41Zcom_10630_2254col_10630_37953

Suspended silicon waveguides for long-wave infrared wavelengths Soler Penadés, Jordi Sánchez-Postigo, Alejandro Nedeljkovic, Milos Ortega-Moñux, Alejandro Wanguemert-Pérez, Juan Gonzalo Xu, Yolanda Halir, Robert Qu, Zhibo Khokhar, Ali Z. Osman, Ahmed Cao, Wei Littlejohns, Callum G. Cheben, Pavel Molina-Fernández, Íñigo Mashanovich, Goran Z. Fotónica In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends. 2024-09-26T17:23:54Z 2024-09-26T17:23:54Z 2018-02-09 journal article https://hdl.handle.net/10630/33537 https://doi.org/10.1364/OL.43.000795 eng http://creativecommons.org/licenses/by/4.0/ open access Atribución 4.0 Internacional Optica Publishing Group