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oai:riuma.uma.es:10630/390832026-02-03T11:22:20Zcom_10630_2254col_10630_37953

RIUMA. Repositorio Institucional de la Universidad de Málaga author Barona-Ruiz, Miguel author Moreno-Pozas, Laureano author Ginel-Moreno, Pablo author Ortega-Moñux, Alejandro author De-Oliva-Rubio, José author Molina-Fernández, Íñigo author Wanguemert-Pérez, Juan Gonzalo author Halir, Robert 2025-06-20T09:13:09Z 2025-06-20T09:13:09Z 2025-04-01 Barona‐Ruiz, M., Moreno‐Pozas, L., Ginel‐Moreno, P., Ortega‐Moñux, A., de Oliva‐Rubio, J., Molina‐Fernández, Í., Wangüemert‐Pérez, J. G., & Halir, R. (2025). Large Beam Size Grating Coupler in Silicon‐on‐Insulator Using Fully Etched Subwavelength Gratings. Laser & Photonics Reviews. 1863-8880 https://hdl.handle.net/10630/39083 10.1002/lpor.202401775 Several emerging applications of silicon photonics, including sensing,ranging, and optical trapping, require ﬁxed, well-collimated beams that enableinteraction with targets placed centimeters away from the chip. Generatingsuch beams without using bulk-optic lenses entails radiating lightwaves withdiameters of hundreds of microns directly from the chip. Gratings withsuﬃciently low strength have so far only been shown in the silicon nitrideplatform using specialized shallow etch steps; in silicon-on-insulator theimplementation becomes much more challenging due to the increased indexcontrast. Here, the ﬁrst silicon-on-insulator grating capable of radiating suchlarge beams is reported. Using a fully etched, double-period subwavelengthstructure, with feature sizes compatible with deep-ultraviolet lithography, abeam diameter in excess of 350 𝛍��m, with a 54% radiation eﬃciency, isexperimentally demonstrated. eng Attribution-NonCommercial-NoDerivatives 4.0 Internacional Fotónica Silicio sobre aislante Large Beam Size Grating Coupler in Silicon-on-Insulator Using Fully Etched Subwavelength Gratings journal article 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 URL https://riuma.uma.es/bitstreams/76ad8405-006a-430a-952c-c9c9f9e036b9/download File MD5 a5a4b7ca902b60aa04fdb33704a9d86e 4759769 application/pdf Laser Photonics Reviews - 2025 - Barona‐Ruiz - Large Beam Size Grating Coupler in Silicon‐on‐Insulator Using Fully Etched.pdf